http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102549755-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-518 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-513 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823857 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-0922 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823807 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-4966 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823462 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8238 |
| filingDate | 2010-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2015-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2015-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-102549755-B |
| titleOfInvention | There is semiconductor device and the manufacture method thereof of oxygen diffusion impervious layer |
| abstract | Provide the method and apparatus for the manufacture of transistor.Transistor comprises the gate stack (142,144,146) covering semi-conducting material (104,106,108,110).Gate stack comprises the deposited oxide layer (126) covering semi-conducting material, covers the oxygen diffusion impervious layer (128) of deposited oxide layer, covers the high-pound dielectric layer (134) of oxygen diffusion impervious layer; And cover the oxygen uptake conductive layer (138) of high-pound dielectric layer.The prevention of oxygen diffusion impervious layer is spread from deposited oxide layer to the oxygen of oxygen uptake conductive layer. |
| priorityDate | 2009-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 44.