http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102541101-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0228 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05D11-132 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45574 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67005 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G05D11-08 |
| filingDate | 2011-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2016-02-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2016-02-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-102541101-B |
| titleOfInvention | material gas control device, control method and control system |
| abstract | The invention provides a kind of material gas control device, control method, control program and control system, even if can prevent material from remaining in a large number, valve also becomes prematurely to be opened completely etc. and to become out of contior state.Described material gas control device comprises: the first valve, is arranged on delivery line; Concentration measuring mechanism, measures the concentration of the material gas in mixed gas; First valve control part, controls the aperture of the first valve, makes the measurement concentration of the material gas measured by concentration measuring mechanism become the setting concentration preset; Second valve, is arranged on ingress pipe; And the second valve control part, the aperture of the second valve is controlled, when making the aperture when the first valve become threshold value aperture, make the aperture of the second valve become at the appointed time and change rear aperture, little first setting of aperture that threshold value opening ratio is opened completely, large second setting of aperture before changing when the aperture of opening ratio first valve becomes threshold value aperture after changing. |
| priorityDate | 2010-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 20.