http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102533121-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F3-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02 |
| filingDate | 2010-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2016-01-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2016-01-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-102533121-B |
| titleOfInvention | A kind of chemical mechanical polishing liquid of polish tungsten |
| abstract | The invention discloses a kind of chemical mechanical polishing liquid, comprise water, fumed silica, silver ions, sulfate ion, superoxide.This polishing fluid has very high tungsten polishing velocity, significantly improves the polishing Selection radio of tungsten and silicon-dioxide simultaneously.<b><u /></b> |
| priorityDate | 2010-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 49.