http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102484026-B

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http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-147
filingDate 2010-08-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2016-02-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2016-02-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-102484026-B
titleOfInvention For improvement of the mode modification that FIB is molded
abstract Improving one's methods of a kind of pilot tape beam of charged particles carrys out by changing one or more deflector signal the time that compensating band charged particle passes through needed for described system.According to one embodiment of present invention, to scan pattern NEURAL DISCHARGE BY DIGITAL FILTER before digital to analogy (D/A) conversion, to reduce or to eliminate the overshoot effect that may be caused by TOF error.In other embodiments, analog filter or the use to the signal amplifier with lower bandwidth also can be used to compensate TOF error.By change scan pattern, significantly can reduce or eliminate overshoot effect.
priorityDate 2009-08-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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Total number of triples: 24.