http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102466467-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8f823f036721e39c61ff0ced537273b8 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 2010-11-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2014-03-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_22301b2db5e9d4dedb178706817d2d54 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_57ddc660e59034a37d0f0acc55934341 |
| publicationDate | 2014-03-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-102466467-B |
| titleOfInvention | Method for monitoring film thickness |
| abstract | A method for monitoring thin film thickness is disclosed, and comprises the steps of: providing a substrate, a reference thin film and a reference heat wave signal; providing the substrate and depositing the thin film on the surface of the substrate; doping for the thin film; performing heat wave measurement for the doped thin film to obtain a heat wave signal; comparing the heat wave signal obtained with the reference heat wave signal, wherein if the absolute value of the difference between the heat wave signal obtained and the reference heat wave signal is smaller than 1/100 of the reference heat wave signal, the thin film obtain is equal to the reference thin film in thickness. The method for monitoring thin film thickness provided by the invention judges whether the table deviates or not and whether the set technical menu meets the requirement or not by measuring and comparing the heat wave signals of the thin films to monitor whether the thin films of different batches are same. In addition, the monitoring method provided by the invention is fast in measurement without damaging samples. |
| priorityDate | 2010-11-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 17.