http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102459693-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-24 |
| filingDate | 2010-05-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2015-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2015-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-102459693-B |
| titleOfInvention | Use the PECVD coating of organosilicon precursor |
| abstract | There is provided herein for a kind of method by PECVD coated substrate surface, the method comprises from comprising a kind of organosilicon precursor and optionally On 2 a kind of gaseous reactant produce a kind of plasma body.By arranging O in this gaseous reactantn 2 with the ratio of this organosilicon precursor, and/or the oilness of this coating, hydrophobicity and/or barrier properties are set by arranging the electric power used for generation of this plasma body.Particularly, a kind of slip coating manufactured by described method is provided.Additionally provide the container and these containers that apply by described method for the protection of a kind of compound being received or being received in described coating container or composition the machinery from the surface of this uncoated container material and/or the purposes of chemical action. |
| priorityDate | 2009-05-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 163.