http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102435384-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d9de52bba13e16028dffa8775e3f3f28 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01L19-04 |
| filingDate | 2011-12-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2013-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b3a16326b13f4a290a39e0df7a32a11e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8a0a67c084b1ef95b28db59668293640 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_55e8633b6ca7bb130b570b792edb8d2b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9e43b95287f7d10a383410dc53305acb http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7732e35fa6c12335177ee22620e0daae |
| publicationDate | 2013-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-102435384-B |
| titleOfInvention | Temperature compensation method of SAW (surface acoustic wave) high-temperature pressure sensor based on vertical-horizontal stress adjustment |
| abstract | The invention relates to a temperature compensation method of an SAW (surface acoustic wave) high-temperature pressure sensor based on vertical-horizontal stress adjustment. The method is characterized in that: based on the optimal selection of SAW sensitive substrate cut, the traditional planar membrane structure is optimized and designed into a structure that the back surface is an inner cylindrical surface. In the invention, by reasonably designing the geometric dimensions of the membrane such as diameter, thickness, radius of the cylindrical surface and the like, the distribution state of the aspect ratio of the surface stress is controlled, and the frequency-temperature characteristic of an SAW resonator on the surface of the membrane is changed, so that the frequency-temperature characteristic of an SAW device is basically kept constant within a relatively wide range of temperature and pressure and a better temperature compensation effect in a scope of wide temperature and wide range is realized. |
| priorityDate | 2011-12-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 19.