http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102413951-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-0028 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09J7-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B1-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B1-00 |
| filingDate | 2010-04-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2016-07-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2016-07-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-102413951-B |
| titleOfInvention | Cleaning sheet, with the conveyance component of cleaning function, the clean method of substrate board treatment and substrate board treatment |
| abstract | The present invention provides a kind of foreign body removal capacity and conveying performance excellent, and efficiency can particularly well remove the cleaning sheet of foreign body and the conveyance component with cleaning function with regulation particle diameter.The cleaning sheet of the present invention possesses the clean layer substantially without bonding force, this clean layer has a concaveconvex shape part that average surface roughness Ra is more than 0.10 μm, and this clean layer to the minute surface of Silicon Wafer with 180 ° of peel adhesion of JIS-Z-0237 regulation for less than 0.20N/10mm.The conveyance component with cleaning function of the present invention possesses conveyance component, is arranged on the clean layer of the present invention of at least one side of this conveyance component. |
| priorityDate | 2009-04-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 141.