http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102412284-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-737 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-331 |
| filingDate | 2011-10-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2014-10-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2014-10-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-102412284-B |
| titleOfInvention | Vertical parasitic positive-negative-positive (PNP) triode in SiGe heterojunction bipolar transistor (HBT) process and manufacturing process thereof |
| abstract | The invention discloses a vertical parasitic positive-negative-positive (PNP) triode in a SiGe heterojunction bipolar transistor (HBT) process. A slot which is contacted with a base region is formed in shallow slot field oxides around the base region, and the depth of the slot is less than or equal to that of the base region; polycrystalline silicon which is doped with N-type impurities is filled in the slot and forms an external base region; the external base region and the base region are contacted on the side of the base region; and metal contact is formed on the external base region and a base is led out. The invention also discloses a manufacturing method for the vertical parasitic PNP triode in the SiGe HBT process. The vertical parasitic PNP triode can be used as an output device in a high-speed and high-gain HBT circuit, one more device choice is provided for a circuit, the device area can be effectively reduced, the parasitic effect of the device can be reduced, the collector resistance of a PNP tube is reduced and the performance of the device is improved; and in the method, extra process conditions are not needed and production cost can be reduced. |
| priorityDate | 2011-10-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 31.