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filingDate 2010-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2014-09-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2014-09-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-102398895-B
titleOfInvention Production method of ultra-pure electronic grade chemical reagent
abstract The invention relates to a production method of an ultra-pure electronic grade chemical reagent. The production method utilizes industrial grade-purity reagents as raw materials and comprises the following steps of carrying out pretreatment, filtering, carrying out rectification of the filtrate, wherein in the rectification, steam is heated to form superheated steam, enabling the superheated steam to pass through a microporous membrane to remove solid particle impurities, cooling the steam obtained by the previous step, and carrying out second-grade membrane filtration of the cooled steam to remove dust particles. The production method of the ultra-pure electronic grade chemical reagent is suitable for large-scale continuous production of ultra-pure electronic grade isopropanol meeting the SEMI-C12 standard and ultra-pure electronic grade hydrochloric acid meeting the SEMI-C8 standard.
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