http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102393600-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ac31afbea1cbbb03498644721ffb4a62 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00 |
| filingDate | 2011-10-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2013-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8a96937a8630585fc6af2049e8397a2d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eec3dc4ec416bccf318be1bd772869b6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c45ed763a60d578ce4e33a76d9ba5a3b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5f2dc997346ac7d3f0c845ff2d852f33 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c2073db8de4421b68471dc63e5ef1374 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0b21ab16685598810b98c21260c9ca02 |
| publicationDate | 2013-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-102393600-B |
| titleOfInvention | Preparation method of nano-imprinting composite template |
| abstract | The invention belongs to the field of a nano-imprinting technology, and particularly discloses a preparation method of a nano-imprinting composite template. The method comprises the following steps of: stretching a polydimethylsiloxane sheet with stretching equipment; spinning an ultraviolet curing glue on a monocrystalline silicon wafer, and covering the stretched polydimethylsiloxane sheet on the surface of the silicon wafer spinned with the glue, and sufficiently absorbing the ultraviolet curing glue; forming a hard layer on the polydimethylsiloxane surface by the curing of the ultraviolet curing glue, and shrinking the stretched polydimethylsiloxane to form a pattern; and finally, etching with a reaction particle beam, forming bonding on the composite pattern, and performing anti-sticking treatment on the surface to obtain a nano-imprinting composite template with a low cost and an adjustable micro-nano size. |
| priorityDate | 2011-10-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.