http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102387872-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-3723 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-0014 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02057 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02052 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67051 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B5-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B7-04 |
| filingDate | 2010-04-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2016-01-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2016-01-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-102387872-B |
| titleOfInvention | Viscoplasticity cleaning material is used to remove equipment and the method for the particle on substrate |
| abstract | The invention provides from substrate surface, equipment and the method for particularly removing particle from the substrate (or wafer) of patterning on the surface.The characteristic aspect on not obvious destruction substrate surface has advantage at the substrate of clean patterning for this cleaning equipment and method.This cleaning equipment and method comprise the viscoplasticity cleaning material using and comprise with the polymer compound being such as greater than 10000g/mol and so on macromolecule.This viscoplasticity cleaning material captures at least part of particle on the surface of a substrate.Within the enough short time, on viscoplasticity cleaning material, apply power, this material is presented promote viscoplasticity cleaning material and the character of catching the solid shape removed together with particle.The power that can apply repeatedly is at short notice with the character of the solid shape close to viscoplasticity cleaning material.Alternatively, when the temperature of viscoplasticity cleaning material reduces, viscoplasticity cleaning material also presents the character of solid shape. |
| priorityDate | 2009-04-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 73.