http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102341670-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_49f04b1dc6b9fcc2d8b159c5ebee364b |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-0633 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-0683 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-06 |
| filingDate | 2010-01-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2013-12-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6ee3a113195ea753f2a5bb07834231e2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2486c47759918f573f69b4b78adb9464 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_056f659e73d05905ef5405c8f86ea205 |
| publicationDate | 2013-12-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-102341670-B |
| titleOfInvention | Film thickness measurement device and measurement method |
| abstract | A film thickness measurement device (1A) is configured so as to include a measurement light source (28), which provides measurement light comprising a measurement light component with a first wavelength (lamda 1) and a measurement light component with a second wavelength (lamda 2) towards an object to be measured (15); a spectral optical system (30) which resolves the light interference of the light reflected from the upper surface and the light reflected from the lower surface of the object to be measured (15) into a light interference component with the first wavelength (lamda 1) and a light interference component with the second wavelength (lamda 2); light detectors (31, 32) which detect the strength of the first and second light interference components at each point in time; and a film thickness analyzer (40). The film thickness analyzer (40) determines the change in thickness of the object to be measured (15) over time, based on the phase difference between a first phase from the change in the detected strength in the first interference component over time, and a second phase from the change in the detected strength in the second interference component over time. As a result, the film thickness measurement device and film thickness measurement method can measure with high precision the change in film thickness over time of an object to be measured which has a film shape. |
| priorityDate | 2009-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 20.