http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102339716-B
Outgoing Links
Predicate | Object |
---|---|
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32467 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32091 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32009 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-321 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32357 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32449 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32522 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
filingDate | 2004-04-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2016-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2016-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | CN-102339716-B |
titleOfInvention | Toroidal low-field reactive gas and the plasma source with dielectric vacuum vessel |
abstract | The application relates to toroidal low-field reactive gas and has the plasma source of dielectric vacuum vessel, describes for the plasma igniting of plasma system and cooling device and method.Device (300) comprises container (390) and at least one ignitor (330) adjacent with this container.The total length of the size (D) of this at least one ignitor is greater than 10% of container path length.This device can comprise insulation toroidal container, have and press to the fin of multiple parts of container and the hot interface between container and fin by the device that spring is housed.Method can comprise the gas providing and have flow velocity and pressure, and a part for gas flow rate is introduced container path.This gas is lighted in the channel, and the remainder of flow velocity is deflected from this passage simultaneously. |
priorityDate | 2003-04-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.