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filingDate 2010-11-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2013-12-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_71cdb331a1238343efc893bf0a235f34
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publicationDate 2013-12-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-102317208-B
titleOfInvention Process for purification of monosilane
abstract Provided is a method of purifying monosilane. More particularly, the method includes removing impurities from a crude material containing monosilane and ethylene by fractional distillation (operation 1), and removing ethylene and residual impurities by passing the crude material purified in operation 1 through activated carbon (operation 2). According to the method, high-purity monosilane may be more simply and effectively obtained without additional production of byproducts by selectively adsorbing ethylene, which is difficult to separate by fractional distillation, using an activated carbon.
priorityDate 2009-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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