Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30621 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0273 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02071 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76825 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76826 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3213 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
filingDate |
2011-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2014-04-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_124605f184cacf24d1ec01748a229026 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e57933d44c4901ad90281f93104c3864 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_153d940b6ad1df124593b0660da19f13 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4adde77e253e0ec0c3499ce742e5cf29 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a43cc7ea10631af53a03362f3cbf78e5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7dd572954e20ffc86ff7211078e9b93c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d37bc9d82207a2d5e6dcf46390dc2aa6 |
publicationDate |
2014-04-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
CN-102315095-B |
titleOfInvention |
Plasma processing method and manufacturing method of semiconductor device |
abstract |
The present invention provides a plasma processing method and a manufacturing method of a semiconductor device, which can avoid the problem of pattern slimming caused by side surface etching and efficiently remove deposit containing a metal deposited on the sidewall by means of drying treatment. A plasma processing method in which performing a plasma etching on metal layers formed on a substrate is conducted to form a pattern having the metal layers in a stacked structure, and then a deposit containing a metal that forms the metal layers and being deposited on a sidewall portion of the pattern is removed, the method includes: forming a protective layer by forming an oxide or chloride of the metal on sidewall portions of the metal layers; removing the deposit by applying a plasma of a gas containing fluorine atoms; and reducing the oxide or chloride of the metal by applying a plasma containing hydrogen after forming the protective layer and removing the deposit. |
priorityDate |
2010-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |