http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102312198-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e1820335826e216586323297f7b5d01f |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-24 |
| filingDate | 2011-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2013-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7483c1eef8be0cb8151266f9c4637113 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_414c1a9dcc6d64891e461428a8104ee9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_37888d5115d0f84e939582ca9a2d947d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_28138693b054639de7b3b5bb67d706ba |
| publicationDate | 2013-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-102312198-B |
| titleOfInvention | Evaporation source and evaporation coating device |
| abstract | The invention relates to a coating device applied to the field of semiconductors, LEDs and solar cells, in particular to an evaporation source and an evaporation coating device. The evaporation source comprises a temperature control module, a carrier gas inlet module, a feeding module, an exhaust module and a thermal insulating module, wherein the temperature control module, the carrier gas inlet module, the feeding module and the exhaust module are all arranged in the evaporation source body, and the thermal insulating module encloses the external surface of the evaporation source body. The evaporation coating device comprises the evaporation source and a vacuum cavity surrounding the evaporation source. In this invention, various functional modules that constitute coating equipments are integrated in a single structure, that is, the evaporation source body, so that the temperature can be controlled stably and uniformly, and the evaporation source and the evaporation coating device achieve simple and compact structure, high integral heat conductivity, high melting point, stable temperature, high raw material utilization rate and uniform coating. |
| priorityDate | 2010-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.