http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102306703-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d9de52bba13e16028dffa8775e3f3f28 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-293 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F04B43-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-25 |
| filingDate | 2011-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2013-05-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1d0336abf0b90b718c0577f2ee621148 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_29da6b514ca04221f672aa36316ff2e6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9f0c49b29f7bdf14b76a63df7db5541d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e22909e4422c2b82f40b2f638b85ab4c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ab5150b8a74aae6efe62c229fb3c5e51 |
| publicationDate | 2013-05-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-102306703-B |
| titleOfInvention | Manufacturing method of minitype piezoelectric pump |
| abstract | The invention discloses a manufacturing method of a minitype piezoelectric pump. The method comprises the following steps: sputtering a chromium copper seeding layer on a double-polishing dioxygen silicon wafer; electroplating metals on the seeding layer to be used as a bottom conductive layer of a piezoelectric ceramic piece; connecting the piezoelectric ceramic piece to the bottom conductive layer; thinning the piezoelectric ceramic piece; opening an etching window of silicon dioxide at the back of the double-polishing dioxygen silicon wafer; etching the silicon dioxide in the etching window to obtain an etching window of silicon; etching the silicon in the etching window by a wet process to obtain a pump cavity; opening an etching window of the piezoelectric ceramic piece on the front surface; cutting the pump cavity with the piezoelectric ceramic piece; etching the piezoelectric ceramic piece which is not protected by a photoresist to obtain the pump cavity with the piezoelectric ceramic piece; and adhering a PDMS (polydimethylsiloxane) cavity with valves on the pump cavity, wherein an inlet valve in the PDMS cavity is connected with a liquid inlet, and an outlet valve is connected with a microneedle. In the manufacturing method provided by the invention, a wet etching process is used for processing the cavity of the pump, and the method is simple and has the low cost; and meanwhile, the very small piezoelectric pump can be manufactured and can control micro-flow liquids and operate reliably. |
| priorityDate | 2011-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 91.