patent/CN-102272904-B

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102272904-B

Outgoing Links

Predicate	Object
assignee	http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_20f12ab58e48cba76595b376f1a15326
classificationCPCAdditional	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-81894 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-0557 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-0401 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-91 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-30105 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-81 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-13009 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2225-06541 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-81801 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2225-06513 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-19041 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-00014 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-81203
classificationCPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-481 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L25-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76898 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L25-0657 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6835 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-0805 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66181 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-945
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-94 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-48 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-60 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-334 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L25-065
filingDate	2010-01-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate	2014-05-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_40011d1f85873f7a7d76bfcfd69cd18e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_15fe9beac81124bd8031c36a192c0ee3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8da94b1d60249242c43c45a907a0de26
publicationDate	2014-05-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	CN-102272904-B
titleOfInvention	Method of forming trench capacitors
abstract	Trench capacitors are formed by depositing insulating layers (26, 30) and conductive layers (28, 32) and using chemical-mechanical polishing. The capacitors are connected to vias (48) for integration with other devices. The wafer (20) comprising the capacitors and vias is bonded to another wafer (74).
priorityDate	2009-01-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate	Subject
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0581475-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2004114397-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007082854-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007005141-A1
isDiscussedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23978 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID418354341

Total number of triples: 51.