| abstract |
The invention provides a kind of electronic device manufacturing works use Hyperpure water manufacturing systems in comprise in the technique of RO membrane separation of charcoal treatment and rear class, the propagation of the microorganism in energy inhibit activities charcoal tower and in reverse osmosis membrane separation device, thus carry out the processing method containing organic water and the treating apparatus of stable process for a long time.Should containing the processing method of organic water, have adding operation containing the clayey controlling agent adding clayey controlling agent in organic water, use charcoal treatment through this clayey controlling agent add operation the charcoal treatment operation containing organic water and by through this charcoal treatment operation containing organic water water flowing in the reverse osmosis membrane separation operation of reverse osmosis membrane separation device, wherein, the bonding chlorine agent formed by chlorine system oxidant and amidosulfonic acid compound is used as clayey controlling agent. |