| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8f659fef8b9a3f8e749d87239911ce1f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c57ecb20ed0959d6917bdc40c0bf6466 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67051
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-422 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05B7-04 |
| filingDate |
2009-11-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2015-06-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_769a3165011ace8c65f175edb63accb6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bb21055ae77be2ccaba4887eef4f3838
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e85200e3873506ebfdcc8ba24fd1fce7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_81b8c3d6956104c528c67a8f551863eb |
| publicationDate |
2015-06-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-102246281-B |
| titleOfInvention |
Method for cleaning object and system for cleaning object |
| abstract |
Disclosed is a method for cleaning an object by irradiating the object with a multiphase fluid containing a gas and liquid drops. The method is characterized in that a desired impact strength is obtained by controlling the degree of liquid-drop-impact cavitation which may be generated when the liquid drops in the multiphase fluid hit on the object. |
| priorityDate |
2008-12-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |