http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102220133-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2731e95721a6ea61aef77c93ff6f152f |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23G1-086 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-06 |
| filingDate | 2010-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2014-02-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fd3d826e09ffabc4d50238740b5de068 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dd05713fb134b53ea7cbf3d8c57243e1 |
| publicationDate | 2014-02-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-102220133-B |
| titleOfInvention | Stripping solution of titanium carbide and/or titanium nitride film and stripping method |
| abstract | The invention provides a stripping solution of titanium carbide and/or titanium nitride films, which is an aqueous solution comprising an acid, an accelerator, a promoter and a corrosion inhibitor, wherein the acid is an organic acid or an inorganic acid, and has an acid concentration of 90-1000 g/L; the accelerator is an acid or a salt containing a fluoride ion, and has a concentration of 70-500 g/L; the promoter is an alcohol amine organic compound, and has a concentration of 15-200 g/L; the corrosion inhibitor is one of or a combination of more than one of thiourea and thiourea derivatives, and has a concentration of 2-8 g/L. The invention also provides a stripping method of the titanium carbide and/or titanium nitride film, and the method comprises the contact of the titanium carbide and/or titanium nitride film and a stripping solution, wherein the stripping solution is the stripping solution provided by the invention. |
| priorityDate | 2010-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 59.