http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102218833-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d9de52bba13e16028dffa8775e3f3f28 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L83-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29D7-00 |
| filingDate | 2010-01-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2013-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_09483989943e8019b45385ff7382a2c0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0ed294dd5e4ba0495932ea59dc977008 |
| publicationDate | 2013-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-102218833-B |
| titleOfInvention | Preparation method of soft template in lattice structure for ultraviolet nano imprinting |
| abstract | A preparation method of a soft template in a lattice structure for ultraviolet nano imprinting in the technical field of nano imprinting, comprising the following steps of: with a porous aluminum template as a parent plate, stirring a polydimethylsiloxane base material and a curing agent according to a proportion and then adding silicon oil to prepare a polydimethylsiloxane diluent; under vacuum conditions, adding the polydimethylsiloxane diluent onto the surface of the parent plate via a needle tube and throwing gel after the surface is completely covered; further covering the polydimethylsiloxane base material and the curing agent on the surface of the parent plate after a gel homogenizing process; and heating and solidifying the parent plate after being vacuumized to prepare the soft template in a lattice structure for ultraviolet nano imprinting. By diluting polydimethylsiloxane with the silicon oil to reduce the coefficient of viscosity of the polydimethylsiloxane, the invention ensures that the polydimethylsiloxane can enter holes of less than 100nm in size to transfer figures. |
| priorityDate | 2010-01-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.