Predicate |
Object |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02422 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0262 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02631 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02562 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E10-543 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02483 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02491 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02472 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02502 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-0057 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-073 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-1884 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-086 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-1836 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34 |
filingDate |
2011-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2016-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate |
2016-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
CN-102208484-B |
titleOfInvention |
The forming method of the conductive transparent oxide film layer used by film photovoltaic device based on cadmium telluride |
abstract |
Present invention generally provides the method forming conductive oxide layer (14) on matrix (12).In a specific embodiment, described method may be included in the sputtering atmosphere target (such as comprising cadmium stannate) comprising cadmium and sputters including transparent conducting oxide layer (14) on matrix (12).Can be sputter temperature sputter including transparent conducting oxide layer (14) of about 100 DEG C to about 600 DEG C.The present invention also generally provides the method preparing film photovoltaic device (10) based on cadmium telluride. |
priorityDate |
2010-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |