| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28562
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28568
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28537
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-482 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-4966
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45531
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4554
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B99-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 |
| filingDate |
2010-05-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2016-01-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2016-01-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-102082087-B |
| titleOfInvention |
Semiconductor device including carbon-containing electrode and manufacturing method thereof |
| abstract |
The present invention relates to a semiconductor device including a carbon-containing electrode having a high work function due to the presence of a carbon-containing titanium nitride (TiN) layer therein, and a method of manufacturing the same. It is possible to provide a dielectric layer with a high permittivity, and thus reduce leakage current by forming an electrode with a high work function. Also, sufficient capacitance of the capacitor can be ensured by using electrodes having a high work function and a dielectric layer having a high permittivity. |
| priorityDate |
2009-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |