| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2201-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03B2201-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P40-57
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03B2201-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2201-20 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C3-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C4-0085
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03B19-1423
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-22 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C3-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03B20-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-60 |
| filingDate |
2010-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2016-12-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2016-12-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-102060432-B |
| titleOfInvention |
Titanium oxide and the quartz glass parts of sulfur codope and manufacture method thereof |
| abstract |
The present invention relates to titanium oxide and the quartz glass parts of sulfur codope and manufacture method thereof.Especially, it is provided that titanium oxide and the quartz glass parts of sulfur codope.Due to titanium oxide and the codope of sulfur, quartz glass parts experiences zero thermal expansion at a certain temperature and experiences low-thermal-expansion in wide temperature range, and therefore, quartz glass parts is suitably employed in commercially available EUV lithography instrument.Additionally provide the preparation method for EUV lithography and optics. |
| priorityDate |
2009-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |