http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102057466-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1a34d7d2e0d09a58cb7bf4a04c81162e |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-228 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2225 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-265 |
| filingDate | 2009-08-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2013-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7949fead9b5d05a0d31011633c8d801d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_afcfa37f281fd4f48d6f8015d5277f07 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_685f8314f4fe422d794ee7a76fb8ae5c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_32166172e86f8b07cfb6b677f5fabfd5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_20b31db29fe47fb12ea04c8f29a64cb8 |
| publicationDate | 2013-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-102057466-B |
| titleOfInvention | Phosphorous-comprising dopants and methods for forming phosphorous-doped regions in semiconductor substrates using phosphorous-comprising dopants |
| abstract | Phosphorous-comprising dopants, methods for forming phosphorous-doped regions in a semiconductor material, and methods for fabricating phosphorous-comprising dopants are provided. In one embodiment, a phosphorous-comprising dopant comprises a phosphorous source comprising a phosphorous-comprising salt, a phosphorous-comprising acid, phosphorous-comprising anions, or a combination thereof, an alkaline material, cations from an alkaline material, or a combination thereof, and a liquid medium. |
| priorityDate | 2008-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 73.