| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4d72711e97d894c55af805c9de2053ab |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L2205-025
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L2205-03 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L33-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2041
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-38 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09 |
| filingDate |
2009-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_123163203517b0ff8efae9f82ba53dcf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_13246df836a051c40e254d755a5f69fc |
| publicationDate |
2011-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-102053492-A |
| titleOfInvention |
Compositions and processes for photolithography |
| abstract |
Topcoat layer compositions are provided that are applied above a photoresist composition. The compositions find particular applicability to immersion lithography processing. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104937493-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104937493-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103582847-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I686451-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103582847-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104684994-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108017970-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104684994-B |
| priorityDate |
2008-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |