http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102023436-B

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assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_88fc7f9eb617072238851d46591a0c76
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1362
filingDate 2009-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2014-07-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2dd1a9d958fea85609196d4782ecd76a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_796f07d70a41f349cee980ba60cb5b96
publicationDate 2014-07-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-102023436-B
titleOfInvention Liquid crystal on silicon (LCoS) panel and manufacturing method thereof
abstract The invention discloses a liquid crystal on silicon (LCoS) panel and a manufacturing method thereof. The LCoS panel comprises a substrate, wherein at least one metal oxide semiconductor transistor is arranged on the substrate; a pixel electrode array is arranged on the substrate; a plurality of color filters with at least two colors are arranged on the pixel electrode array; a gap is reserved between the adjacent color filters; at least two color filters are non-coplanar; inorganic films are arranged on the color filters and in the plurality of gaps; and organic films are completely arranged on the surface of the inorganic films. According to the planarization effect brought by the two layers of films, the invention provides a process, which has lower cost and shorter time compared with the known process of performing planarization steps by chemical mechanical polishing. The LCoS panel with better optical property can be provided under the condition of saving energy (such as depositing the inorganic films without a high-temperature thermal process), so that the yield of subsequent encapsulation is improved.
priorityDate 2009-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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Total number of triples: 26.