http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102023436-B
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_88fc7f9eb617072238851d46591a0c76 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1362 |
filingDate | 2009-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2014-07-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2dd1a9d958fea85609196d4782ecd76a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_796f07d70a41f349cee980ba60cb5b96 |
publicationDate | 2014-07-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | CN-102023436-B |
titleOfInvention | Liquid crystal on silicon (LCoS) panel and manufacturing method thereof |
abstract | The invention discloses a liquid crystal on silicon (LCoS) panel and a manufacturing method thereof. The LCoS panel comprises a substrate, wherein at least one metal oxide semiconductor transistor is arranged on the substrate; a pixel electrode array is arranged on the substrate; a plurality of color filters with at least two colors are arranged on the pixel electrode array; a gap is reserved between the adjacent color filters; at least two color filters are non-coplanar; inorganic films are arranged on the color filters and in the plurality of gaps; and organic films are completely arranged on the surface of the inorganic films. According to the planarization effect brought by the two layers of films, the invention provides a process, which has lower cost and shorter time compared with the known process of performing planarization steps by chemical mechanical polishing. The LCoS panel with better optical property can be provided under the condition of saving energy (such as depositing the inorganic films without a high-temperature thermal process), so that the yield of subsequent encapsulation is improved. |
priorityDate | 2009-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.