http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-101928650-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-32 |
| filingDate | 2009-06-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2016-02-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2016-02-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-101928650-B |
| titleOfInvention | A kind of fluoro-containing composition and application thereof |
| abstract | The invention discloses a kind of fluoro-containing composition and application thereof, the nonmetal corrosion inhibitor used in this fluorine-containing liquid composite, the i.e. multipolymer of polyvinylpyrrolidone and vinyl acetate; Be characterized in fluorine-containing liquid composite, all inhibited to polysilicon, the corrosion of silicon-dioxide as non-metallic material such as the silicon-dioxide of boron phosphorus doping.And fluoro-containing composition is one of widely used scavenging solution in the semiconductor industry, and the control to nonmetal erosion rate, be the long-term objective that it is pursued, therefore the less fluoro-containing composition of nonmetal erosion rate has widened its application prospect in cleaning semiconductor chip field further always. |
| priorityDate | 2009-06-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 67.