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filingDate 2010-01-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2013-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2013-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-101777615-B
titleOfInvention Method for preparing GaN substrate with porous surface and GaN substrate prepared by using the method
abstract The invention relates to a method for preparing a GaN substrate with a porous surface and a GaN substrate prepared by using the method. A porous structure is directly prepared on the surface of the GaN substrate by a wet etching method with simple process, low damage and high etching rate. The method for preparing a GaN substrate with a porous surface comprises the following steps of: a, plating a layer of aluminum film on the GaN layer on the surface of the GaN substrate; b, applying voltage in acid solution in an electrochemistry cell, and realizing anodic oxidation by an electrochemistry method so that the aluminum film becomes porous alumina; c, applying voltage continuously to 60-200V, etching the surface of the GaN substrate by the electrochemistry method and forming a porous structure on the surface of the GaN layer; and d, removing oxide on the surface to obtain the GaN substrate with a porous surface. In the invention, a disorder and porous structure on the surface of the GaN substrate is designed and prepared so that the optical propagation of the GaN-air interface is randomized, the total reflection of the interface is reduced to the maximum extent, and the light extraction efficiency is greatly improved.
priorityDate 2010-01-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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