http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-101696345-B
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5cedae1e4103c4e3719a5e9c94c2b510 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 |
filingDate | 2009-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2013-09-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_998f37318dd7a23bfc0cd1162b08c850 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_956ed39dcb40f848b88e40f5f11a67b8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ec4f615cfffe524e1f57e6121162bf25 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b75c5575712035015441703e31670fc3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1fc55e94b7a49d79c54f4795d2c5d3d3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dc8c2b5b54baabe660fe07ff17949285 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7b7b2c6cfc2fdb51bf8f151566afaf0b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_57c9849b23eb4959e81fd63134ab0c1e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b19461c6d3bc00c253cb466aeb7641e7 |
publicationDate | 2013-09-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | CN-101696345-B |
titleOfInvention | Aluminum doped cerium rouge and preparation method thereof |
abstract | The invention relates to aluminum doped cerium rouge and a preparation method thereof. The preparation method comprises the following steps: using cerous carbonate as a raw material; adding a water-soluble aluminum salt and excessive ammonia water into the cerous carbonate; performing mechanical ball milling on the mixture to ensure that cerous carbonate particles are dispersed and are covered bythe formed amorphous aluminum hydroxide; and dehydrating, drying and re-dispersing the slurry after the ball milling, calcining at a high temperature, cooling and performing ball milling to obtain the aluminum doped cerium rouge which has good polishing capability. The water-soluble aluminum salt can be selected from aluminum nitrate, aluminum chloride, aluminum acetate and aluminum sulfate. The doped amount of aluminum is from 0.01 percent to 10 percent in terms of the percentage composition of aluminum oxide in the cerium rouge; the concentration of the ammonia water is between 1 and 15 mol/L, and the addition of the ammonia water is 1 to 10 times of the amount of metal materials; the ball milling time is between 1 and 10 hours; the sample calcination temperature after ball milling and drying is between 800 and 1,200 DEG C; and the calcination time is between 30 minutes and 10 hours. The preparation method is suitable for preparing efficient polishing powder, and the prepared polishing powder can be used for the surface finishing of microelectronic devices and precise optical glass. |
priorityDate | 2009-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 52.