http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-101689480-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_097405822d505467fd50f7100022cd56 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D61-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-3092 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-425 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-422 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D71-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D61-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2008-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cee45fca7fd3c44819e019e1f59e0ee1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_90c5fcb371b5965f4942cbb241f44ba0 |
| publicationDate | 2010-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-101689480-A |
| titleOfInvention | System for continuously using resist stripper liquid based on nanofiltration |
| abstract | The object of the invention is to realize a system in which a resist stripper liquid used in resist stripping is regulated so as to have a resist component concentration within a certain concentrationrange even when the resist stripper liquid is continuously used for long without replacing it. In stripping a positive resist with a stripper liquid, the resist components which have dissolved in thestripper liquid can be diminished by cross-flow filtration with a specific ceramic filter (5). In the resist stripping system, a resist-component-containing stripper liquid resulting from a strippingstep is treated in a filtration step, and the resultant concentrated stripper liquid having a heightened resist-component concentration is suitably discharged from the system. A fresh stripper liquidis suitably added to the stripper liquid from which the resist components have been removed, and the resultant stripper liquid is reused in the stripping step. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102566334-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108054119-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103721427-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103721427-B |
| priorityDate | 2007-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 49.