http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-101681926-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5f7f120efe096284c7389702c969cf3d |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1248 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78636 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1214 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1248 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78606 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G09F9-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786 |
| filingDate | 2008-02-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_06a82563cc7b5ea5744932293fbebea3 |
| publicationDate | 2010-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-101681926-A |
| titleOfInvention | Active matrix substrate, method for producing the same, and flat display |
| abstract | Disclosed is an active matrix substrate having excellent transistor characteristics and high reliability, which can be produced by a simple process. Also disclosed is a method for producing such an active matrix substrate. Specifically disclosed is an active matrix substrate comprising a base and a thin film transistor formed on the base and having an amorphous silicon film. In this active matrixsubstrate, a silicon oxide layer is arranged on the amorphous silicon film, and an organic protective film is arranged on the silicon oxide layer. Also specifically disclosed is a method for producingsuch an active matrix substrate, which comprises (1) a step for forming a silicon oxide layer on an amorphous silicon film a by oxidizing the surface of an amorphous silicon film A of a thin film transistor formed on a base, and (2) a step for forming an organic protective film of a radiation-sensitive resin composition on the silicon oxide layer. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103443707-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015096318-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9412797-B2 |
| priorityDate | 2007-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 157.