| abstract |
This application provides the optical absorbing agents for being used to form organic anti-reflective layer, are indicated by following formula 1 or formula 2. Excellent adhesiveness and storage stability are shown using the AR coating that the compounds of this invention is formed, and show excellent resolution ratio in C/H pattern and L/S pattern. The AR coating also has excellent process window, thus can get excellent pattern distribution, and it is unrelated with the type of substrate. [formula 1] |