| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6cad0e70ded0b8dac0d71884bd16c29c |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 |
| filingDate |
2006-12-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e8e922073d7bf670bacb818e8e7c923c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bb90af9282d629e20f0f6ee2c00e8713 |
| publicationDate |
2009-11-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-101573420-A |
| titleOfInvention |
Planarization composition for metal surfaces comprising an alumina hydrate abrasive |
| abstract |
The present invention provides CMP abrasive slurry that is substantially free of aluminum oxide and comprises liquid and solids wherein the solids comprises: (a) in an amount of at least about 90 weight percent based on the solids, at least one non-spherical component having formula Al2O3-xH2O where x ranges from 1 to 3; and (b) up to about one weight percent based on the solids portion of submicron alpha-alumina. The CMP abrasive slurry may be used to polish metallic or dielectric surfaces in computer wafers. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103952084-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109233644-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109233644-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103952084-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107964374-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113851250-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107964374-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113851250-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105585965-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105585965-B |
| priorityDate |
2006-12-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |