http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-101479403-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1c3ad592b7cdca08b1a22035c7f4dc53 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-507 |
| filingDate | 2007-04-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9394d1273449a5de571126254b9427e2 |
| publicationDate | 2009-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-101479403-A |
| titleOfInvention | Plasma deposition apparatus and method for making solar cells |
| abstract | A plasma deposition apparatus for making solar cells comprising a conveyor having a longitudinal axis for supporting at least one substrate; at least two modules each having at least one plasma torch for depositing a layer of a reaction product on the at least one substrate, the at least one plasma torch located a distance from the at least one substrate; a chamber for containing the conveyor and the at least two modules; and an exhaust system. In another embodiment, the plasma deposition apparatus for making solar cells comprises: means for supporting a substrate; means for supplying reactants; plasma torch means for depositing a product on the substrate, the plasma torch means located a distance from the substrate; and means for oscillating the plasma torch means relative to the substrate. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11316193-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104792768-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102816999-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10490805-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104792768-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105793462-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10865480-B2 |
| priorityDate | 2006-04-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 62.