| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_65e6cc42bb2719da1d60772d005416f5 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31053 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01F17-00 |
| filingDate |
2008-12-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_729a2e1203294d53ef7acadcad1e0517
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c11d69e626643f3bce1a9732dd2c40f0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2271a2ef350048006e69b89a21114b7b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c8bca58ac0a38e2afeb4851cdb6fe9b1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d3d97ac2d49c64ea421924b7d975eed5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_45217c8bf5a233a44e05bd205ba48a51 |
| publicationDate |
2009-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-101475203-A |
| titleOfInvention |
Abrasive particles, method of manufacturing the abrasive particles, and method of manufacturing chemical mechanical polishing slurry |
| abstract |
The invention provides a ground particle used for a chemical mechanical polishing liquid, a manufacturing method thereof, and a manufacturing method of the chemical mechanical polishing liquid. The manufacturing method of the ground particle used for the chemical mechanical polishing liquid comprises: preparing raw material precursor; drying the material precursor; and utilizing a calciner to calcine the dry material precursor, wherein the calciner is formed by atmosphere which is a shortage of oxygen compared with air. |
| priorityDate |
2007-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |