http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-101469253-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 |
| filingDate | 2008-12-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2015-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2015-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-101469253-B |
| titleOfInvention | Composition for polishing |
| abstract | The present invention relates to composition for polishing.The invention provides composition for polishing, it can take into account and suppresses the generation of surface step degree and realize high grinding rate in the grinding step preparing wiring structure.Composition for polishing; its contain abrasive material, processing promotor, with R-POE (in formula, R represents that the carbonatoms with branched structure is the alkyl of 10 ~ 16, and POE represents polyoxyethylene chain) expression and HLB be 7 ~ 12 nonionogenic tenside, anion surfactant, protective membrane forming agent, oxygenant and water. |
| priorityDate | 2007-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 75.