http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-101454482-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-00 |
| filingDate | 2007-05-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2a4def593cede2cc68ea12f18194f0f7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_510c7b3774c6172b770c5a4ec04f32e7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b1cbc915edc506f8d44a0bc81ddceaaf http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_76b09d00efe2d341d03dd39238df37c6 |
| publicationDate | 2009-06-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-101454482-A |
| titleOfInvention | Process chamber for dielectric gapfill |
| abstract | A system to form a dielectric layer on a substrate from a plasma of dielectric precursors is described. The system may include a deposition chamber, a substrate stage in the deposition chamber to hold the substrate, and a remote plasma generating system coupled to the deposition chamber, where the plasma generating system is used to generate a dielectric precursor having one or more reactive radicals. The system may also include a precursor distribution system comprising a dual-channel showerhead positioned above the substrate stage. The showerhead may have a faceplate with a first set of openings through which the reactive radical precursor enters the deposition chamber, and a second set of openings through which a second dielectric precursor enters the deposition chamber. An in-situ plasma generating system may also be included to generate the plasma in the deposition chamber from the dielectric precursors supplied to the deposition chamber. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10550472-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8894767-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104011847-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103748972-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103748972-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102754190-A |
| priorityDate | 2006-05-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 71.