| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fbdc51c2665335e616caf341cdaa3d28 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32862
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-505
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32449
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32357 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50 |
| filingDate |
2007-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d51523d36fe1f0b6bd470457b473a1e3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fe1bd73c8f435e8ae637c0bafd1efc53
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9f58dfb8e82c905cf8bbb8e3fee485df
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5606b2420755abab9ee83807d7b90a72
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0d0145180b8c2f70ab975ab7e61ba393
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_147a9405d8928cabe6aca0b68e372dcb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9cb4a448c9cce5ef0ae985ecac07d684 |
| publicationDate |
2009-06-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-101451237-A |
| titleOfInvention |
Plasma reaction chamber with plurality of plasma reaction zones including plurality of treatment platforms |
| abstract |
The invention provides a plasma reaction chamber, which comprises a reaction chamber main body, and a plurality of processing platforms are arranged in the reaction chamber main body. A rotary substrate support is arranged in each processing platform; a plasma generating area which is homothetic with a plasma participation reaction area is arranged above each substrate support; a corresponding adjacent plasma generating area is arranged above each homothetic plasma generating area; and the homothetic plasma generating area is communicated with the corresponding adjacent plasma generating area. A radio frequency energy source is connected with each adjacent plasma generating area. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104395987-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105695958-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10233542-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103874315-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105695958-B |
| priorityDate |
2007-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |