| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b051f9f7933c758e66f6ceda5c9fb2cc |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2041 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate |
2005-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2013-05-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1a0cadb4f81b4644945f7a0e8640669a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dd55b668c28f00ca3bc0a6fdc3d1ad87
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_48c798212b181c43d768ea53a316323a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6d5db7df58da9f96d89aacd9ab5790b6 |
| publicationDate |
2013-05-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-101430509-B |
| titleOfInvention |
Immersion lithography fluids |
| abstract |
Suitable additives that may be added into immersion fluids, immersion fluids comprising at least one carrier medium selected from an aqueous fluid, a non-aqueous fluid, and mixtures thereof, and immersions fluids comprising at least one carrier medium and at least one additive useful for performing immersion lithography at an operating wavelength ranging from 140 nm to 365 nm are disclosed herein. |
| priorityDate |
2004-01-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |