| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31053 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 |
| filingDate |
2006-12-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6c60ad1c36444b3b83acf5e64f94fff0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0f71c9729dad264959e3c64897375fa1 |
| publicationDate |
2008-12-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-101331593-A |
| titleOfInvention |
Aqueous dispersion for chemical mechanical polishing, chemical mechanical polishing method, and kit for preparing aqueous dispersion for chemical mechanical polishing |
| abstract |
Disclosed is an aqueous dispersion for chemical mechanical polishing which contains (A) abrasive grains having a pore volume of not less than 0.14 ml/g and (B) a dispersion medium. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103917332-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108504288-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113510538-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109590811-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106947396-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102666771-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109590811-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106336812-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-115746692-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-115746692-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106336812-B |
| priorityDate |
2005-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |