| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01K11-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01K11-06 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01K3-00 |
| filingDate |
2006-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ff2eb94a2a574d15224a2555e1d4deca |
| publicationDate |
2008-04-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-101156056-A |
| titleOfInvention |
Accurate temperature measurement for semiconductor applications |
| abstract |
A temperature sensing component enables accurate in situ temperature measurement. The temperature sensing component is disposed within the process chamber. The temperature sensing component has a cavity, in which a transparent cover is disposed over an opening of the cavity. A material is disposed within the cavity of the temperature sensing component, and a sensor is configured to sense a phase change of the material through the transparent cover. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104296889-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104296889-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102313599-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102313599-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111928967-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102439402-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102439402-B |
| priorityDate |
2005-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |