| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K10-471
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01B3-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01B3-18 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-288
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-51
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786 |
| filingDate |
2007-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c1980f44e1909ea04d34fece9c589050
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c2f5ee34b09c114b0bb5d014cd8d2e0d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4979772441844e0222ff5a019b2d64f7 |
| publicationDate |
2008-04-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-101154588-A |
| titleOfInvention |
Composition for dielectric thin film, metal oxide dielectric thin film using the same and preparation method thereof |
| abstract |
This invention pertains to a composition for a dielectric thin film, which is capable of being subjected to a low-temperature process. Specifically, the invention is directed to a metal oxide dielectric thin film formed using the composition, a preparation method thereof, a transistor device comprising the dielectric thin film, and an electronic device comprising the transistor device. The electronic device to which the dielectric thin film has been applied exhibits excellent electrical properties, thereby satisfying both a low operating voltage and a high charge mobility. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-100543941-C
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102870245-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102870245-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105283926-A |
| priorityDate |
2006-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |