| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6b822ee046eb6c45d1e3bd9ce9c1782e |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-1362
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P80-30 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1285
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-124
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1248
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1292
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-268 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate |
2007-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0c41c5ee3f4346654571e46c624db9ff
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_269120a97800836abad154ca55cfe85e |
| publicationDate |
2008-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-101136312-A |
| titleOfInvention |
Method for manufacturing semiconductor device and method for manufacturing display device |
| abstract |
An object is to provide a method for manufacturing a highly-reliable semiconductor device with an improved material use efficiency and with a simplified manufacturing process. The method includes the steps of forming a conductive layer over a substrate, forming a light-transmitting layer over the conductive layer, and selectively removing the conductive layer and the light-transmitting layer by irradiation with a femtosecond laser beam from above the light-transmitting layer. Note that the conductive layer and the light-transmitting layer may be removed so that an end portion of the light-transmitting layer is located on an inner side than an end portion of the conductive layer. Before the irradiation with a femtosecond laser beam, a surface of the light-transmitting layer may be subjected to liquid-repellent treatment. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9461070-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102489873-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113128276-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102311095-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014206021-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105334680-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102311095-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102404514-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102489873-A |
| priorityDate |
2006-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |