http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-100582940-C
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-14 |
| filingDate | 2003-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2010-01-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_97d584d0e41ad980c0779744470b83b2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1eb482587d5a734bbd34d197aaa83f43 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8c5c2d3721686885034c71183b2faff8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9518817015fe35bad40fd1d15ddaa88a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_975f7d3fdb97c1bacc5e0b7fd1c3a7a3 |
| publicationDate | 2010-01-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-100582940-C |
| titleOfInvention | Composition for forming antireflection coating |
| abstract | A composition for forming an antireflection coating, characterized in that it comprises an organic solvent and, dissolved therein, (A) a ladder silicone copolymer containing (a<SUB>1</SUB>) 10 to 90 mole % of a (hydroxyphenylalkyl)silses-quioxane unit, (a<SUB>2</SUB>) 0 to 50 mole % of a (alkoxyphenylalkyl)silsesquioxane unit and (a<SUB>3</SUB>) 10 to 90 mole % of an alkyl or phenylsilsesquioxane unit, (B) an acid generator generating an acid upon exposure to heat or light, and (C) a crosslinking agent, and is capable of forming an antireflection coating exhibiting an optional parameter (k value) for an ArF laser of the range of 0.002 to 0.95. The composition is soluble in an organic solvent, can be applied by a conventional spin coating method with ease, has good storage stability, and can exhibit an adjusted preventive capability for reflection through the introduction of a chromophoric group absorbing a radiation ray thereto. |
| priorityDate | 2002-12-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 74.