http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-100510170-C
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f90c1df3857ee72900e0015c75caecd9 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-513 |
| filingDate | 2006-12-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2009-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4f3ec6fb156000ba9024898d3bc73961 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_368caf65f544d4d83d5c625ec17e2c1c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3ea0f63659a4907aa12cf7633187a7f9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f3e2ed970a13c88bdadbf70af3aa5a6c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1be3ecbd2870e28b09a5ec9fba89d49e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_74b197870e3ab6bc86bcad76ee29caae http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bdfbce1b7b3e71de53fe9d7f3a960534 |
| publicationDate | 2009-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-100510170-C |
| titleOfInvention | System and technique for chemically gas-phase Zn(O,S) film through DC glow discharge plasma |
| abstract | The invention discloses a making method of CIGS solar battery tool and reacting system of DC glow plasma chemical gas-phase sediment Zn(O,S) and ZnO film, which comprises the following parts: vacuum reacting lid, upper and lower inlet, insulating seat, cooling chamber on the quartz reacting cavity, upper and lower gas cavity, upper and lower outlet pipe with top in the upper and lower gas cavities, wherein the bottom of upper outlet pipe pierces the plasmid area; the outlet of lower gas pipe is set on the plasmid area; two gas pipes are arranged at interval evenly, which are vertical of p-CIGS substrate on the tantalum piece of graphite table; the reacting chamber is extracted into vacuum, which heats p-CIGS substrate; the composite gas of carbon dixodie, hydrogen sulfide and hydrogen is input into inlet pipe, which reacts completely under plasmid; the gas of zinc diethyl or zinc dimethyl is input into inlet pipe, which sediments low-resistance ZnO film on the Zn(O,S) film to obtain n-ZnO/Zn(O,S)/p-CIGS/Mo/glass solar battery tool. |
| priorityDate | 2006-12-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 47.