http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CH-691776-A5
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7c24de7156f52f50edec5a78099dde10 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-0021 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-0641 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-325 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-32 |
filingDate | 1997-04-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cad9045d8e6a6c78b68fdb88ef8a240b |
publicationDate | 2001-10-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | CH-691776-A5 |
titleOfInvention | Plasma coating process and working layers that can be produced with this process. |
abstract | Plasma coating process comprises selecting a bias voltage of less than 50 V to be applied to a substrate in a coating chamber so that the maximum of the energy distribution function of the electrons in the plasma lies below the dissociation potential of he working gas. The number of higher energetic electrons lies below a value having an effect on the working layer. An Independent claim is also included for a tool for carrying out the coating process comprising a working layer in the form of a hard material layer or a wear-resistant layer. Preferred Features: The hard material layer contains molybdenum sulfide to increase the lubricity. |
priorityDate | 1997-04-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 33.