| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fc8549d74558eb302167a690c0c838ec
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5f3fbce1ee15625c4ff9da0431535646 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-448
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D5-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K5-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-043 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-448
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-22 |
| filingDate |
2014-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2020-06-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a7245ba133de27f37abe467060418b7d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7e381d5c765a5bda35a566e7b8e11e45 |
| publicationDate |
2020-06-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CA-2963882-C |
| titleOfInvention |
Solid source and method for the synthesis of silicon-containing precursors for chemical vapor deposition |
| abstract |
The present document described a solid source and a method for synthesis of silicon-containing precursors for chemical vapor deposition. The solid source comprises a solid polysilane; an energy coupling agent distributed in the solid polysilane; and hydrogen, mixed with the solid polysilane and the energy coupling agent distributed in the solid polysilane, in a necessary amount to satisfy a hydrogen deficiency during a hydrogenolysis reaction. |
| priorityDate |
2013-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |